시설 및 장비

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Machining Systems

Diamond Turning Machine · DTM-250 · JS PRECISION
Machining Center · Mynx 400 · Doosan

Imaging and Characterization

FE-SEM · S-4800 · Hitachi
High Speed Camera · KT1210 · Phantom

Process Monitoring and Multisensor Measurement

Dynamometer · 9119A + 5167A · Kistler
Accelerometer · AC214-1D · CTC
Microphone · CRY333-T1
Acoustic Emission Sensor · R15α · MISTRAS
DAQ Module · cDAQ-9174, NI-9260, NI-9775 · National Instruments
Current Amplifier · DLPCA-200 · FEMTO

Precision Motion and Nanomeasurement

Nanopositioning Stage · P-620.2CD + PI E-727.3CDA · Physik Instrumente
Precision Linear Stage (X, Y) · GO LS4545 HV · PRECIBEO
Precision Linear Stage (Z) · GO Elevation HV · PRECIBEO
Precision Rotation Stage · GO ROTATION STAGE 4545 HV · PRECIBEO

Others

Motor Dynamometer · N/A · 자체 제작